Expertise in electronic manufacturing: Coating | Etching | Cleaning

scia Systems provides technologies and process equipment for various microelectronic applications:

  • Smart sensor technology
    e.g., biotechnology sensors, lab-on-chip systems, GMR, TMR, IR sensors

  • High-frequency electronics
    e.g., BAW, SAW

  • Cost-efficient power electronics
    Advanced Silicon & beyond

  • System Integration by Advanced Electronics Packaging
    e.g., multichip packages, SiPs, 3D packaging

MEMS Application Notes

SENSOR Application Notes

One system for all your processes: scia Cluster 200

Whether you want multiple chambers dedicated to one process or want to combine our wide process know how – we have the ideal cluster-layout for you!

  • Ion Beam Trimming (IBT)
  • (Reactive) Ion Beam Etching (RIBE)
  • (Dual) Ion Beam Deposition (DIBD)
  • Magnetron Sputtering (PVD)
  • Reactive Ion Etching (RIE)
  • Plasma Enhanced Chemical Vapor Deposition (PEVCD)
  • Atomic Layer Deposition (ALD)
  • Electron Beam Evaporation (EBE)

Selected systems for microelectronics production

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scia Systems GmbH
Clemens-Winkler-Str. 6c
09116 Chemnitz

☎   +49 371 33561-561