Learning: Scientific Content about Thin Film Technology

We want to support the continuous development of plasma and ion beam technology, so we share our knowledge. The learning portal of scia Systems offers scientific insights for both beginners and experts. If you have any questions or need more information on any topic, please do not hesitate to contact us.


Advanced Patterning for Slanted Surface Relief Gratings

Video presentation: Methods to create optical gratings with constant or variable slant angle

Ion beam technology for frequency filters in mobile communication

In every cell phone are components that have been manufactured on the production lines of scia Systems.


Ion beam technology for thin piezoelectric films

Video presentation: The advantages of ion beam technology for piezoelectric layers.

Overview of PVD Technologies

Comparison of ion beam sputtering, magnetron sputtering and evaporation. 


Ion beam figuring for telescope mirrors

Video presentation: surface error correction under high vacuum conditions.

Ion beam trimming of POI wafers

Video presentation: Surface correction of piezoelectric materials


Slanted gratings by ion beam trimming

Video presentation: Processing of optical gratings with varying slant angles by reactive IBT

Reactive ion etching of anti-reflective nanostructures

Moth-eye effect on substrates up to 300 mm and on 3D-Objects.


The Technology of Ion Beam Figuring

Etching with extremely high precision especially for optical substrates

Magnetron Sputtering of silicon dioxide

Advantages of magnetron sputtering for SiO2  deposition


Direct etching of slanted gratings

Video presentation: Etching of SRG used as in- and out-coupler in waveguides.

Ion beam etching for optics structuring

Video presentation: How to structure your optics with reactive ion beam etching.

Additional Information

Technology Overview

Ion beam and plasma processes for etching, coating and cleaning of substrates.

Application Notes

Selected applications for MEMS, optics and sensors, presented in detail.

Product Portfolio

Discover our equipment for coating, etching and cleaning processes.