Learning: Scientific Content about Thin Film Technology
We want to support the continuous development of plasma and ion beam technology, so we share our knowledge. The learning portal of scia Systems offers scientific insights for both beginners and experts. If you have any questions or need more information on any topic, please do not hesitate to contact us.
Advanced Patterning for Slanted Surface Relief Gratings
Video presentation: Methods to create optical gratings with constant or variable slant angle
Ion beam etching for optics structuring
Video presentation: How to structure your optics with reactive ion beam etching.
Ion beam technology for thin piezoelectric films
Video presentation: The advantages of ion beam technology for piezoelectric layers.
Overview of PVD Technologies
Comparison of ion beam sputtering, magnetron sputtering and evaporation.
Ion beam figuring for telescope mirrors
Video presentation: surface error correction under high vacuum conditions.
Ion beam trimming of POI wafers
Video presentation: Surface correction of piezoelectric materials
Slanted gratings by ion beam trimming
Video presentation: Processing of optical gratings with varying slant angles by reactive IBT
Magnetron Sputtering of silicon dioxide
Advantages of magnetron sputtering for SiO2 deposition
The Technology of Ion Beam Figuring
Etching with extremely high precision especially for optical substrates
Direct etching of slanted gratings
Video presentation: Etching of SRG used as in- and out-coupler in waveguides.
Additional Information
Technology Overview
Ion beam and plasma processes for etching, coating and cleaning of substrates.
Application Notes
Selected applications for MEMS, optics and sensors, presented in detail.
