Expertise in Thin Film Technology
scia Systems develops ion beam and plasma process systems for nanometer-precise processing of surfaces. The company offers standard systems and customized tools using a wide range of coating and etching processes. Furthermore scia Systems is a capable and reliable service provider with a variety of services from classic support to retrofit of existing equipment.
The Institute Precision Optical Engineering of the Tongji University in Shanghai, one of Chinas renowned universities, ordered a scia Coat 500 and a scia Trim 200, which will be delivered by end of 2020.
The scia Coat 500 will be used for manufacturing of periodic multilayers in nm range on X-ray mirrors for beamline optics, by dual ion beam sputtering (DIBS). Due to the high homogeneity requirements of those optics, a surface adjustment is needed previously to the deposition process. Therefore, a surface form error correction is done with the scia Trim 200 by local ion beam figuring (IBF) beforehand.