Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.


Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers all over the world.


Do you want to play an active role in a high-tech and fast-growing market environment and build up a successful career? Discover our oppotunities:




Our equipment is mainly used in the production of MEMS and precision optical components, but it is also used in astronomy, automotive and biomedical technology.


scia Systems stands for highly reliable equipment to meet expectations for today and the future. Our experienced and qualified team assists you to find the optimal system and process design for your production requirement.

Improved silicon wafer processing for ESA’s X-ray observatory "Athena"

With the Athena project, the European Space Agency will launch the largest X-ray telescope ever built into space. A new kind of optics had to be invented in order to achieve the goal of looking deeper into the universe than any previous X-ray observatory missions. scia Systems, a high-tech company based in Chemnitz, Germany, supplies crucial technology to produce these optics.

Read more

SPO module

Big Sience Business Forum (BSBF)

2022-10-04 to 2022-10-07
Granada, Spain
Booth 61 (Floorplan)

Fachtagung Mikrosystemtechnik

2022-11-09 to 2022-11-10
Dorint Kongress Hotel
Chemnitz, Germany


2022-11-15 to 2022-11-18
in Munich, Germany
Booth: C1-828 (Floorplan)


* mandatory field