Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.

Products

Discover our equipment for coating, etching and cleaning processes. The systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers all over the world.

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Applications

Our equipment is mainly used in the production of microelectronics, MEMS and precision optical components. However, there are also several applications in the field of astronomy, automotive and biomedical technology.

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Company

scia Systems stands for highly reliable equipment to meet expectations for today and the future. Our experienced and qualified team assists you to find the optimal system and process design for your production requirement.

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Career

Do you want to play an active role in a high-tech and fast-growing market environment and build up a successful career? We are always looking for new team members who want to grow with us.

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News

Successful development in research project HiPERFORM

With the substrate holder designed by scia Systems, epitaxial Aluminum Nitride (epi-AlN) can now be deposited on silicon (111). This is an important step for the development of GaN-based switch technologies. As these have up to 30% less energy losses compared to existing architectures, they can be used to produce more affordable and efficient electric and hybrid vehicles.

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HiPERFORM process chamber

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