scia Systems - From Nano to Infinity

Expertise in Thin Film Technology

scia Systems, based in Chemnitz, Germany, develops and manufactures high-end equipment for ultra-precise surface processing using advanced ion beam and plasma technologies. The systems are designed for coating, etching, and cleaning with nanometer accuracy. scia Systems stands for perfection at the nanometer scale. Since its foundation in 2013, scia Systems has established itself as a technology leader in thin-film processing. The equipment is known for its reliability, flexibility, and performance, tailored to the specific needs of high-volume production and research applications.

scia Systems offers a wide range of ion beam and plasma process equipment that enables our customers to design new and innovative products with unique functional properties. Machines made by scia Systems have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.

Products

Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.

Applications

Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Company

Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

Patterning of Lithium Niobate via Ion Beam Etching for Photonic Integrated Circuits

Photonic Integrated Circuits (PICs) consist of various optical components. These include light sources, modulators, detectors, and waveguides. Those components work together to generate, control, and receive light signals. Among the materials used for PICs, Lithium Niobate is particularly promising for optical waveguides and modulators. Its strong Pockels effect, with an electro-optic coefficient of approximately 30 pm/V, enables efficient modulation of light.

Our new application note demonstrates ion beam etching for pattern transfer in fabricating lithium niobate (LiNbO3, abbr. LN) waveguides.

Want to learn more? Read the complete Application Note for free.

Read more

Application Note

SPIE OPTICS + PHOTONICS

2026-08-23 to 2026-08-27
San Diego, USA | Booth: 829 (Floorplan)
Presentation: Moth-eyes-antireflective nanostructures on strongly curved optics by Faraday cage reactive ion etching 

PSE 2026

2026-08-31 to 2026-09-03
Erfurt, Germany | Booth: 27
Presentation: Spatial thickness control in magnetron sputter deposition by pulse-width modulation 

NFO18

2026-08-31 to 2026-09-03
Brno, Czech Republic
Partner on site: Vakuum servis

 

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