Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.

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Surface Polishing Test for the Thirty Meter Telescope (TMT)

In February 2020 scia Systems carried out a detailed study of final surface polishing for TMT International Observatory, LLC. The ion beam figuring (IBF) of the 1.4 m large TMT mirror segment prototype was performed on a scia Finish 1500 IBF system.

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