scia Systems - From Nano to Infinity

Expertise in Thin Film Technology

scia Systems, based in Chemnitz, Germany, develops and manufactures high-end equipment for ultra-precise surface processing using advanced ion beam and plasma technologies. The systems are designed for coating, etching, and cleaning with nanometer accuracy. scia Systems stands for perfection at the nanometer scale. Since its foundation in 2013, scia Systems has established itself as a technology leader in thin-film processing. The equipment is known for its reliability, flexibility, and performance, tailored to the specific needs of high-volume production and research applications.

scia Systems offers a wide range of ion beam and plasma process equipment that enables our customers to design new and innovative products with unique functional properties. Machines made by scia Systems have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.

Products

Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.

Applications

Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Company

Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

scia Systems Showcases New Innovations in Semiconductor Failure Analysis and Photonic Integrated Circuit Processing at SEMICON Korea 2026

scia Systems GmbH will showcase new capabilities at SEMICON Korea 2026, taking place February 11-13 at the COEX in Seoul, South Korea.

The company will present its industry-leading scia Mill series of ion beam etching (IBE) systems supporting high-precision, high-throughput semiconductor device manufacturing and failure analysis (FA). scia Systems will also highlight key advances in ion-beam processing for photonic integrated circuit (PIC) manufacturing.

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Semicon Korea

Shenzhen Microgate Technology Receives Ion Beam Trimming Equipment from scia Systems

The Chinese high‑tech enterprise Shenzhen Microgate Technology has expanded its cleanroom with a scia Trim 200. The system provides precise surface correction in thin-film and wafer materials using ion beam trimming. Film thickness non-uniformity can be improved down to 0.1 nm.

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scia Trim 200 for microgate

Semicon Korea

2026-02-11 to 2026-02-13
Seoul, South Korea | Booth: A354 (Floorplan)
Presentation by Denis Joschko: 3D Nanopatterning using Ion Beam Etching

SPIE Advanced Lithography

2026-02-24 to 2026-02-25
San Jose, USA
Booth: 430 (Floorplan)
Partner on site: AARD Technology

Laser World of Photonics China

2026-03-18 to 2026-03-20
Shanghai, China
Booth: E7.7228
Partner on site: 3Keysystems

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