Expertise in Thin Film Technology
scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.
Products
Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.
Applications
Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.
Company
Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about.
CIOE
2024-09-11 to 2024-09-13
Shenzhen, China
Booth: 3A41 (Thuringian pavilion)
MNE 2024
2024-09-16 to 2024-09-19
Montpellier, France
Oral Track by Matthias Nestler: High Throughput Magnetron Sputtering of Tilted c-Axis AlN Films for Biosensing Applications
Joint Vacuum Conference
2024-09-30 to 2024-10-04
Split, Croatia