Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.


Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.


Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.


Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

scia Systems is SEMI member

We are proud to announce that scia Systems is now an official member of the SEMI industry association. This international community of over 3,000 member companies, representing the global electronics supply chain from design to manufacturing, is dedicated to supporting the semiconductor industry in developing life-changing technologies. 

Want to learn more about our solutions for the semiconductor and MEMS industry? Visit or schedule a short discussion with our technical sales team.

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UGIM 2024 @ MIT.nano

2024-06-24 to 2024-06-25
Cambridge, USA
Partner on site: AARD Technology



2024-06-26 | 11:35 CEST
Dresden, Germany
Invited Presentation by Robert Metzner: Enhancing Augmented Reality: Flexible Production of SRG with Ion Beam Technology

NNT NIL Industrial Day

2024-06-26 | 12:30 CEST
Lund, Sweden
Presentation by Dr. Mandy Göring: The Future of Augmented Reality: How Ion Beam Processing Improves SRG Manufacturing


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