scia Systems - From Nano to Infinity

Expertise in Thin Film Technology

scia Systems, based in Chemnitz, Germany, develops and manufactures high-end equipment for ultra-precise surface processing using advanced ion beam and plasma technologies. The systems are designed for coating, etching, and cleaning with nanometer accuracy. scia Systems stands for perfection at the nanometer scale. Since its foundation in 2013, scia Systems has established itself as a technology leader in thin-film processing. The equipment is known for its reliability, flexibility, and performance, tailored to the specific needs of high-volume production and research applications.

scia Systems offers a wide range of ion beam and plasma process equipment that enables our customers to design new and innovative products with unique functional properties. Machines made by scia Systems have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.

Products

Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.

Applications

Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Company

Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

New App-Note: Magnetron Sputtering of Contact Metallization for TMR Devices

In addition to the magneto-resistive multilayer stack, the metallization and additional coating layers play an important role in the performance and reliability of tunnel magnetoresistance (TMR) sensors. This Application Note shows how to deposit metallization stacks for TMR devices with a scia Magna 200 cluster tool. It covers the process approach, the tool configuration, and the key design considerations.

Want to learn more? Read the complete Application Note for free.

Read more

Preview App-Note

Semicon WEST

2026-10-13 to 2026-10-15
San Francisco, USA
Booth: 3303 South Hall (Floorplan)
Partner on Site: AARD Technology

PIC Summit Europe

2026-11-03 to 2026-11-04
Eindhoven, Netherlands
Partner on site: Benelux Process
 

SEMICON Europa

2026-11-10 to 2026-11-13
in Munich, Germany
Booth: B1-909 (Floorplan)
 

Contact

scia Systems GmbH
Clemens-Winkler-Str. 6c
09116 Chemnitz
Germany

Tel: +49 371 33561-0

✉   sales@scia-systems.com