scia Systems - From Nano to Infinity

Expertise in Thin Film Technology

scia Systems, based in Chemnitz, Germany, develops and manufactures high-end equipment for ultra-precise surface processing using advanced ion beam and plasma technologies. The systems are designed for coating, etching, and cleaning with nanometer accuracy. scia Systems stands for perfection at the nanometer scale. Since its foundation in 2013, scia Systems has established itself as a technology leader in thin-film processing. The equipment is known for its reliability, flexibility, and performance, tailored to the specific needs of high-volume production and research applications.

scia Systems offers a wide range of ion beam and plasma process equipment that enables our customers to design new and innovative products with unique functional properties. Machines made by scia Systems have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.

Products

Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.

Applications

Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Company

Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

The Shenzhen International Quantum Academy (IQASZ) Expands its Micro- and Nanofabrication Capabilities with Ion Beam Equipment from scia Systems

The scia Mill 150 system is ideally suited for full-surface structuring of complex multilayers. In addition to the ion beam source, the system supplied to IQASZ features an integrated magnetron sputtering source. This configuration enables both structuring and in-situ passivation of the multilayer stack.

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Robert Rückriem becomes new managing director

With effect from January 1, 2026, Robert Rückriem joined the management team at scia Systems. Together with Dr. Michael Zeuner and Dr. Michael Gempe, he will lead the company going forward.

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MicroNanoFabrication

2026-05-12
Lausanne, Switzerland

 

CS MANTECH

2026-05-18 to 2026-05-21
Portland, USA
Booth: 202 (Floorplan)
Partner on site: AARD Technology

Dry Etching Expert School

2026-05-26 to 2026-05-29
Porto Salvo, Portugal
Presentation: Ion Beam Processing: From Theory to Practice

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