Ion Beam Sputtering Systems
High quality multilayer deposition on wafers up to 200 mm
- Ion Beam Sputtering (IBS)
- Dual Ion Beam Sputtering (DIBS)
- Ion Beam Etching (IBE)
Large area homogeneous multilayer coating for precision optics
- Ion Beam Sputtering (IBS)
- Dual Ion Beam Sputtering (DIBS)
- Ion Beam Etching (IBE)
Homogeneous coating of precision optics up to 300 mm dia.
- Ion Beam Sputtering (IBS)
- Dual Ion Beam Sputtering (DIBS)
More Information
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- Overview of Ion Beam and Plasma Processing Technologies
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