Tailor Made Equipment for your Application

You can’t find suitable vacuum equipment for your application? Along with you we develop an adequate process for your needs and design a system based on our joint concept.

Our experienced and qualified team allows every system to meet our as well as the customers’ requirements.

Your Benefit

  • Utilization of the whole technology portfolio of scia Systems
  • Single chamber, Cluster or Inline systems available
  • Choose your loading configuration: cassette, single substrate load lock or manual loading
  • Versatile systems for R&D as well as production environments realizable

Our Expertise

  • Process development
  • Design of models, layouts and drafts
  • Software development and system control
  • Complete media and electrical planning
  • Documentation, CE-certification and risk analysis
  • Internal manufacturing and assembling of core components

One system for all your processes: scia Cluster 200

Whether you want multiple chambers dedicated to one process or want to combine our wide process know how – we have the ideal cluster-layout for you!

Reach out

Please contact us for further information.

Product Overview

Download our brochure as PDF.