Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Application Notes

Selected application examples in detail. more

White Paper

Our experts share their knowledge. more


Published Scientific Papers.


Scientific Content about Thin Film Technology. more

Expertise in microelectronic manufacturing: Coating | Etching | Cleaning

scia Systems provides technologies and process equipment for various microelectronic applications.

Technology Overview

Ion beam and plasma processes for etching, coating and cleaning of substrates. more

Product Portfolio

Our portfolio of ion beam and plasma processing equipment. more