About scia Systems

The company was founded 2013 in partnership with the VON ARDENNE GmbH from Dresden and is located in Chemnitz, Germany. As manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS and precision optics manufacturing.

scia Systems stands for highly reliable equipment to meet expectations for today and the future. To ensure our high standards, we work closely with our customers to optimize tool performance and meet the future roadmap requirements. To ensure an optimum and individual customer support scia Systems built up a worldwide network of local sales and service partners.

Dr. Michael Zeuner, Dr. Michael Gempe — Managing Directors: Dr. Michael Zeuner (left) and Dr. Michael Gempe (right),

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Range of Services

System Design
New design or adaption of standard systems in design and/or process

Manufacturing
In-house core components manufacturing and usage of high quality standard components

Software Development
Easy to use GUI and worldwide remote access support

Research & Development
Own department for process optimization and support

Service & Support
Training, maintenance, spare parts and retrofits

Latest News

From June 24 to 27, 2025, scia Systems will present its latest process solutions for coating and structuring based on advanced ion beam and plasma technologies at Laser World of Photonics 2025 in Munich, Germany. The focus will be on the coating and form error correction of X-ray optics, the structuring of optical gratings for AR glasses, and the creation of microstructures for photonic integrated circuits (PICs).

Memberships

Memberships in research and industry associations generate synergistic effects by exchanging and increasing of know-how. Therefor scia Systems is member of the following associations: