About scia Systems

The company was founded 2013 in partnership with the VON ARDENNE GmbH from Dresden and is located in Chemnitz, Germany. As manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS and precision optics manufacturing.

scia Systems stands for highly reliable equipment to meet expectations for today and the future. To ensure our high standards, we work closely with our customers to optimize tool performance and meet the future roadmap requirements. To ensure an optimum and individual customer support scia Systems built up a worldwide network of local sales and service partners.

Range of Services

System Design
New design or adaption of standard systems in design and/or process

In-house core components manufacturing and usage of high quality standard components

Software Development
Easy to use GUI and worldwide remote access support

Research & Development
Own department for process optimization and support

Service & Support
Training, maintenance, spare parts and retrofits

Our commitment 2023: scia Systems supports local nonprofits with a total of 5000 Euro

Supporting social and charitable projects is an important aspect of our corporate philosophy. As a globally active company, we know how important it is to maintain local ties and support the region where we work. That way we can help make Chemnitz and the surrounding area an attractive home for families, students and professionals. We are therefore proud to support small and large associations with a total of 5,000 euros.

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Our Engagement 2022


Memberships in research and industry associations generate synergistic effects by exchanging and increasing of know-how. Therefor scia Systems is member of the following associations:


European Society of Thin Films


Network of Competence of Industrial Plasma Surface Technology

SAWLab Saxony

The scientific network for acoustoelectronics!


International society for optics and photonics.


We are certified according to EN ISO 9001:2015.