About scia Systems

The company was founded 2013 in partnership with the VON ARDENNE GmbH from Dresden and is located in Chemnitz, Germany. As manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS and precision optics manufacturing.

scia Systems stands for highly reliable equipment to meet expectations for today and the future. To ensure our high standards, we work closely with our customers to optimize tool performance and meet the future roadmap requirements. To ensure an optimum and individual customer support scia Systems built up a worldwide network of local sales and service partners.

Managing Directors (f.l.t.r.): Robert Rückriem, Dr. Michael Zeuner and Dr. Michael Gempe

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Range of Services

System Design
New design or adaption of standard systems in design and/or process

Manufacturing
In-house core components manufacturing and usage of high quality standard components

Software Development
Easy to use GUI and worldwide remote access support

Research & Development
Own department for process optimization and support

Service & Support
Training, maintenance, spare parts and retrofits

Latest News

With effect from January 1, 2026, Robert Rückriem joined the management team at scia Systems. Together with Dr. Michael Zeuner and Dr. Michael Gempe, he will lead the company going forward.

Augmented reality (AR) and mixed reality (MR) have swiftly transitioned from a futuristic concept to a practical technology, altering the landscape of numerous sectors. For the development of lightweight near-eye displays, surface relief gratings (SRG) are employed to couple light from the source into the waveguide and then guide it out toward the eye. Ion beam trimming has been adapted as a versatile approach for creating SRGs with varying trench depths.

This study demonstrates how reactive ion beam trimming can be utilized to produce slanted surface relief gratings, featuring different grating geometries in terms of width and pitch, suitable for the specific requirements of nanoimprint lithography.

Memberships

Memberships in research and industry associations generate synergistic effects by exchanging and increasing of know-how. Therefor scia Systems is member of the following associations: