About scia Systems

The company was founded in 2013 in partnership with the VON ARDENNE GmbH from Dresden and is located in Chemnitz, Germany. As a manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS and precision optics manufacturing.

scia Systems stands for highly reliable equipment that meets both current and future industry demands. By working closely with our customers, we continuously enhance system performance and align with upcoming roadmap requirements. To provide tailored, first‑class support, scia Systems has established a global network of local sales and service partners.

Managing Directors (f.l.t.r.): Robert Rückriem, Dr. Michael Zeuner and Dr. Michael Gempe

Range of Services

System Design
New design or adaption of standard systems in design and/or process

Manufacturing
In-house manufacturing of core components and integration of high-quality standard components

Software Development
Complete in-house software development and worldwide remote access support

Research & Development
Own department for process optimization and support

Installation & Training
Worldwide Commissioning, on-site assembly & customer training

Service & Support
Maintenance, spare parts and retrofits

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Latest News

In addition to the magneto-resistive multilayer stack, the metallization and additional coating layers play an important role in the performance and reliability of tunnel magnetoresistance (TMR) sensors. This Application Note shows how to deposit metallization stacks for TMR devices with a scia Magna 200 cluster tool. It covers the process approach, the tool configuration, and the key design considerations.

Want to learn more? Read the complete Application Note for free.