About scia Systems

The company was founded 2013 in partnership with the VON ARDENNE GmbH from Dresden and is located in Chemnitz, Germany. As manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS and precision optics manufacturing.

scia Systems stands for highly reliable equipment to meet expectations for today and the future. To ensure our high standards, we work closely with our customers to optimize tool performance and meet the future roadmap requirements. To ensure an optimum and individual customer support scia Systems built up a worldwide network of local sales and service partners.

Range of Services

System Design
New design or adaption of standard systems in design and/or process

In-house core components manufacturing and usage of high quality standard components

Software Development
Easy to use GUI and worldwide remote access support

Research & Development
Own department for process optimization and support

Service & Support
Training, maintenance, spare parts and retrofits

scia Systems highlights advances in ion beam processing fueling semiconductor mega market trends at SEMICON West 2024

scia Systems will present its key advances in ion beam processing for semiconductor, sensor, and photonic integrated circuit (PIC) manufacturing at SEMICON West 2024, which will take place from July 9 to 11, 2024, at the Moscone Center in San Francisco, USA. scia Systems’ high-precision solutions are essential in enabling many of today’s high-growth consumer and industrial applications. The applications include manufacturing three-dimensional optoelectronic microstructures for PICs, such as waveguides, production of GMR/TMR sensors, and precision reverse engineering of ICs.

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Memberships in research and industry associations generate synergistic effects by exchanging and increasing of know-how. Therefor scia Systems is member of the following associations:


European Society of Thin Films


Network of Competence of Industrial Plasma Surface Technology

SAWLab Saxony

The scientific network for acoustoelectronics!


International society for optics and photonics.


We are certified according to EN ISO 9001:2015.