Ion Beam Trimming Systems
High-volume production system for film thickness correction of wafers up to 200 mm
- Ion Beam Trimming
- Ion Beam Figuring
Precise surface correction for impressively uniform films on wafers up to 300 mm
- Ion Beam Trimming
- Ion Beam Figuring
Polishing error correction of high-precision optical elements up to 1500 mm dia.
- Ion Beam Figuring
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