Polishing Error Correction for Lenses and Mirrors

The scia Finish 1500 is used for surface form error correction of high-precision optical elements. The system is suitable for high volume production with 24/7 operation due to fast pumping times and high removal rates of the ion beam source.

Features & Benefits

  • Long term stable process for repeatable quality of optical components
  • Excellent precision on large areas
  • High removal rates for high throughput
  • Easy loading of large substrates due to sliding doors
  • Designed for high volume production with short pump down times


  • Final surface form error correction of lenses and mirrors
    • Telescope mirrors (Zerodur®, SiC, LTEM)
    • Conventional optics (quartz and other glasses)
    • Ion beam figuring of X-ray optics (Si)

Application Note


  • Focused broad ion beam scans across substrate surface in vertical setup for low contamination
  • Dwell time control to remove different amounts of material


Ion Beam Figuring (IBF) is a polishing error correction by a scanning ion beam and dwell time control.

Detailled Information

Technical Data
Process Results

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Product Flyer scia Finish 1500


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Product Overview

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Other Ion Beam Etching Systems

scia Trim 200

for precise surface correction
of wafers up to 200 mm

scia Trim 300

for large area surface correction of wafers up to 300 mm

scia Mill 300

for full surface etching of wafers up to 300 mm