PECVD/RIE Systems
Large Area Coating and Etching
Processing of substrates up to 300 mm x 200 mm
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Reactive Ion Etching (RIE)
Large area processing up to 750 mm square
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Reactive Ion Etching (RIE)
3-dimensional Coatings
Biocompatible coatings on 3D-substrates
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
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