PECVD/RIE Systems

Large Area Coating and Etching

 

Processing of substrates up to 300 mm x 200 mm

  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Reactive Ion Etching (RIE)

 

Large area processing up to 750 mm square

  • Plasma Enhanced Chemical Vapor Deposition (PECVD)
  • Reactive Ion Etching (RIE)

3-dimensional Coatings

 

Biocompatible coatings on 3D-substrates

  • Plasma Enhanced Chemical Vapor Deposition (PECVD)

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