Substrate size | Individual sizes loaded on 2 carriers, carrier size up to 350 mm x 240 mm |
Substrate carrier | Water-cooled, pulsed DC bias (2 kV, 400 mA) |
Plasma source | RF parallel plate arrangement, 13.56 MHz |
Power Supply | RF power max. 2 x 600 W |
Electrode setup | Temperature: heating up to 400 °C; distance: adjustable between 50 mm and 150 mm |
Operation modes | Independent or coupled electrodes |
Base pressure | < 5 x 10-7 mbar |
System dimension (W x D x H) | 0.90 m x 1.70 m x 2.10 m (without electrical rack and pumps) |
Configuration | Single chamber with manual loading in batches |
Software interfaces | SECS II / GEM, OPC |
3D-Coatings in Batches
The scia Batch 350 is designed for biocompatible coatings of 3‑dimensional shaped substrates. Thereby, the carrier concept enables different substrate sizes and shapes in one batch. With its stable, reproducible and certified process, the system meets the high quality standards for treatment of medical objects.
Features & Benefits
- Coating of different substrate sizes and quantities in batches due to carrier loading
- Two independent RF electrodes for high throughput
- Homogeneous “all-around coating” by individual rotation of each substrate
- Superior barrier performance and fully cohesive film, also during mechanical deformation
- Combination of heating, plasma pre-treatment and PECVD coating
- Flexible gas and RF conditions
Applications
Stent for vascular intervention, PRO-Kinetic Energy © BIOTRONIK
- 3-dimensional barrier coating of biocompatible films for medical implants (pacemakers, stents)
Principle
- RF parallel plate arrangement with rotation of each substrate for a uniform coating of all sides
Technologies
Plasma Enhanced Chemical Vapor Deposition (PECVD) is a plasma assisted reactive process to deposit thin films from a gas state (vapor) into a solid state on a substrate.
Detailled Information
Technical Data
Process Results
Reach out
Please contact us for further information.
More PECVD/RIE Systems
scia Cube 300
for large area coating and etching
over 300 mm x 200 mm
