3D-Coatings in Batches

The scia Batch 350 is designed for biocompatible coatings of 3‑dimensional shaped substrates. Thereby, the carrier concept enables different substrate sizes and shapes in one batch. With its stable, reproducible and certified process, the system meets the high quality standards for treatment of medical objects.

Features & Benefits

  • Coating of different substrate sizes and quantities in batches due to carrier loading
  • Two independent RF electrodes for high throughput
  • Homogeneous “all-around coating” by individual rotation of each substrate
  • Superior barrier performance and fully cohesive film, also during mechanical deformation
  • Combination of heating, plasma pre-treatment and PECVD coating
  • Flexible gas and RF conditions


  • 3-dimensional barrier coating of biocompatible films for medical implants (pacemakers, stents)


  • RF parallel plate arrangement with rotation of each substrate for a uniform coating of all sides


Plasma Enhanced Chemical Vapor Deposition (PECVD)  is a plasma assisted reactive process to deposit thin films from a gas state (vapor) into a solid state on a substrate.

Technical Data

Substrate size

Individual sizes loaded on 2 carriers, carrier size up to 350 mm x 240 mm

Substrate carrier

Water-cooled, pulsed DC bias (2 kV, 400 mA)

Plasma source

RF parallel plate arrangement, 13.56 MHz

Power Supply

RF power max. 2 x 600 W

Electrode setup

Temperature: heating up to 400 °C; distance: adjustable between 50 mm and 150 mm

Operation modes

Independent or coupled electrodes

Typical deposition rate

SiC: 5 nm/min

Base pressure

< 5 x 10-7 mbar

System dimension (W x D x H)

0.90 m x 1.70 m x 2.10 m (without electrical rack and pumps)


Single chamber with manual loading in batches

Software interfaces



PDF Download

Product Flyer scia Batch 350


Reach out

Please contact us for further information.


More PECVD/RIE Systems

scia Cube 300

for large area coating and etching
over 300 mm x 200 mm

scia Cube 750

for large area coating and etching
over 750 mm x 750 mm