Expertise in optics manufacturing based on advanced ion beam and plasma technologies
Coating
- Multilayer Coatings for EUVL applications
- High- and anti-reflective layers for mirrors and optical filters
- Gradient multilayer coatings of mirrors for EUV, soft X-ray and anti-reflective coatings
- Layers with property gradients (Göbel mirrors) or refractive index gradient
Etching
- Nano-Structuring of gratings and other structures in optical materials
- Production of 3-dimensional optoelectronic microstructures
- Final surface form error correction for telescope mirrors, X-ray optics, lenses and conventional optics
- Ion beam smoothing for reduction of microroughness
Cleaning
- Ultra-high purity cleaning for X-ray optics
- Removal of slightest contaminations for EUVL-components
Optics Application Notes
Patterning of Lithium Niobate via Ion Beam Etching
Ion Beam Thickness Trimming for Photonic Integrated Circuit Wafers
Etching of Surface Relief Gratings for Augmented & Mixed-Reality-Devices
Dielectric Coatings on large substrates
High- and Anti-Reflective Coatings with Ta2O5 and SiO2
Form Error Correction for X-ray mirrors
Deposition of DLC for glass compression molds
Video Presentations
Advanced Patterning - Ion Beam Etching of Slanted Surface Relief Gratings
Ion beam figuring for telescope mirrors of different sizes
Processing of optical gratings with varying slant angles by reactive ion beam trimming
Direct etching of slanted gratings for waveguides for AR and MR devices
How to structure your optics with ion beam etching
Selected systems for optics processing
Advanced Ion Beam & Plasma Solutions for Optics Manufacturing
We develop and manufacture vacuum processing equipment for coating, etching, trimming, and cleaning in demanding optical and photonic applications.
The featured solutions enable:
- High-reflective and anti-reflective optical coatings
- Correction of form errors in X-ray and telescope mirrors
- Structuring of micro-optics and surface relief gratings for augmented reality (AR) glasses
- Manufacturing processes for photonic integrated circuits (PIC) and EUVL optics
Ask for your dedicated solution!
scia Systems GmbH
Clemens-Winkler-Str. 6c
09116 Chemnitz
Germany
Tel: +49 371 33561-0