The Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP from Dresden works on the development of innovative production technologies for surface processing. With the ordered scia Magna 200 aluminum nitride and silicon oxide should be deposited for piezoelectric and passivation layers on SAW/BAW components.

The scia Magna 200 combines the advanced system design of scia Systems with the unique Double Ring Magnetron sputter source DRM 400 from Fraunhofer FEP. This architecture provides a very high homogeneity of coatings at impressively high deposition rates.