scia Multi 500: Our New System for Multilayer Coatings on Optical Substrates up to 500 x 300 mm
Our scia Multi 500 magnetron sputtering system is designed specifically for multilayer coating deposition on optics at (sub-) nanometer precision. Typical applications for the equipment are multilayer coatings for UV lithography and X-ray applications.
In a linear inline setup with load locks at both ends, the vertically aligned substrate moves in front of six magnetrons with different target materials and an optional ion source for surface treatment. Gradient layers and superior uniformity are achieved by precisely positioning the substrate and a synchronized linear movement and spin rotation.