Together with project partners scia Systems is working within the ALMET project on the development of systems and processes for the atomic layer deposition of metallic thin films (mALD). The objective of the project is the conformal deposition of copper and cobalt thin films within an industrial-suited ALD reactor. The reactor allows plasma assisted ALD (PALD) by a special chamber-in-chamber layout and enables a variety of different ALD processes. scia Systems is pleased to support the project with its experience and know-how.