Applications
Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.
Application Notes
Selected application examples in detail. more
White Paper
Our experts share their knowledge. more
Publications
Published Scientific Papers.
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Expertise in microelectronic manufacturing: Coating | Etching | Cleaning
scia Systems provides technologies and process equipment for various microelectronic applications.
Ion Beam Technology for Slanted Surface Relief Gratings
scia Systems provides technologies and process equipment for the production of augmented and mixed-reality devices
Technology Overview
Ion beam and plasma processes for etching, coating and cleaning of substrates. more
Product Portfolio
Our portfolio of ion beam and plasma processing equipment. more
