Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.

Products

Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.

Applications

Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Company

Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

scia System Receives an Order for a Combined Ion Beam Sputter Deposition and Ion Beam Etching System from NIST

We proudly announce that the National Institute of Standards and Technology (NIST), one of the longest established physical science laboratories in the U.S., has purchased a scia Coat 200 system. The customer will install his new ion beam sputtering system in its Boulder Microfabrication Facility (BMF). The state-of-the-art research laboratory supports the most sensitive research done at NIST to fabricate its next-generation microelectronic and microelectromechanical devices. The BMF will use the scia Coat 200 to deposit metals and dielectric materials as well as for the structuring of sensors and other devices.

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SPIE Advanced Lithography

2024-02-27 to 2024-02-28
San Jose, USA
Booth: 733 (Floorplan)
Partner on site: AARD Technology

GOMACTech

2024-03-19 to 2024-03-20
North Charleston, USA
Booth: 110
Partner on site: AARD Technology

Semicon China

2024-03-20 to 2024-03-22
Shanghai, China
Booth:  N4 | 4783
Partner on site: WESi Technology

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