Magnetron Sputtering Systems
Dynamic Deposition for Large Area Substrates
Flexible multi-chamber coating system for substrates up to 1500 mm dia.
- Magnetron Sputtering
Static Deposition on Wafers
Advanced wafer coatings with high rates on wafers up to 200 mm
- Magnetron Sputtering
(Single-Magnetron Sputtering or Confocal Sputtering)
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