Multilayer Coatings for Large Substrates up to 1500 mm in dia.

The scia Multi 1500 is designed for periodic multilayer coatings on curved substrates. With its superior process performance over multiple 100 multilayer periods, high precision homogeneous or gradient films are possible. The modular chamber concept with separate process chambers, buffer chambers and loading chambers simultaneously allows high flexibility, regarding the tool configuration, and high throughput.

Features & Benefits

  • Homogeneous or gradient films on curved substrates by synchronized linear movement and spin rotation
  • Inline arrangement with multiple process and buffer chambers for complete crossing over the magnetrons
  • 4 magnetrons in each process chamber
  • Optional pretreatment with additional ion beam source
  • Substrate face-down orientation for minimized particle load

Applications

  • Gradient multilayer coatings of mirrors for soft X-ray and anti-reflective coatings
  • Multilayer stacks for X-ray mirrors for beam line and analytic applications
  • Multilayer coating for UV and VIS optics

Principle

  • Magnetron Sputtering
    • Inline arrangement with 4 magnetrons in each process module
    • Linear substrate movement across magnetrons and superimposed rotation of the substrate

Technical Data

Substrate size (up to)

1500 mm dia., 850 kg

Sputter source

4 rectangular magnetrons (1200 mm x 90 mm) per chamber, ion beam source possible

Sputter modes

DC in cw or pulsed mode (6 kW) and/or
RF (6 kW, 13.56 MHz)

Typical deposition rates

Si: 48 nm/min, Mo: 78 nm/min

Uniformity variation

< 0.5 % (σ/mean) over 1200 mm dia.

Base pressure

< 2 x 10-8 mbar

System dimension (W x D x H)

11.00 m x 4.20 m x 5.00 m, for 1 process chamber (without electrical rack and pumps)

Configuration

Inline system with multiple coating chambers and 2 buffer chambers, single substrate load-lock, optional loading and balancing stage

Software interface

OPC

More Magnetron Sputtering Systems

scia Magna 200

for advanced wafer coatings
of up to 200 mm

scia Multi 680

for multilayer coating for large
substrates up to 680 mm