Ion Beam Sputtering Systems

 

High quality multilayer deposition on wafers up to 200 mm

  • Ion Beam Sputtering (IBS)
  • Dual Ion Beam Sputtering (DIBS)
  • Ion Beam Etching (IBE)

 

Large area homogeneous multilayer coating for precision optics

  • Ion Beam Sputtering (IBS)
  • Dual Ion Beam Sputtering (DIBS)
  • Ion Beam Etching (IBE)

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