scia Coat 500 - High uniformity multilayer coatings on large area optics
by Dual Ion Beam Deposition (DIBD)
The scia Coat 500 is designed for homogeneous coating of high precision optics. Typical applications of the system are multilayer films for X-ray mirrors and filter coatings.
The scia Coat 500 applies a beam from a linear ion beam source onto a rectangular sputter target. This linear geometry provides a good homogeneity of the deposited film in one dimension. Meanwhile, the sample is moved on a linear axis in a direction perpendicular to the beam's profile, thereby contributing to homogeneity or defined gradients of the coating in the second dimension.
In addition the sample stage is equipped with a spin rotation and a changeable shaper system (up to 4 shapers) in front of the sample stage.
Up to 200 mm with load-lock
Ion Beam Source
Rectangular microwave ECR-source LIN380‑e
Plasma bridge neutralizer N‑DC
Target drum with 6 targets (tiltable), each with max. 400 mm x 200 mm
Typical deposition rate
Si: 10 nm/min
Linear from 0.01 mm/min up to 15 mm/min; Rotation up to 300 rpm
≤ 0.5 % over 200 mm dia.
≤ 5 x 10-8 mbar
|System dimensions (W x D x H)|
3.30 m x 1.70 m x 2.10 m
1 process chamber, 1 load-lock optional
SECS II / GEM, OPC on request