Polishing Error Correction for Lenses and Mirrors
The scia Finish 1500 is used for surface form error correction of high-precision optical elements. The system is suitable for high volume production with 24/7 operation due to fast pumping times and high removal rates of the ion beam source.
Features & Benefits
- Long term stable process for repeatable quality of optical components
- Excellent precision on large areas
- High removal rates for high throughput
- Easy loading of large substrates due to sliding doors
- Designed for high volume production with short pumping down times
Applications
- Final surface form error correction of lenses and mirrors
- Telescope mirrors (Zerodur®, SiC, LTEM)
- Conventional optics (quartz and other glasses)
- Ion beam figuring of X-ray optics (Si)
Application Note
- Form Error Correction for X-ray mirrors
Principle
- Focused broad ion beam scans across substrate surface in vertical setup for low contamination
- Dwell time control to remove different amounts of material
Technologies
Ion Beam Figuring (IBF) is a polishing error correction by a scanning ion beam and dwell time control.
Technical Data
Substrate size (up to) | 1500 mm dia., 400 kg |
Axis performance | Max. velocity 0.15 m/s, max. acceleration 15 m/s² |
Ion beam source | 37 mm circular RF source (RF37-i) with 7 ... 15 mm (FWHM) or |
Neutralizer | RF plasma bridge neutralizer (N-RF) |
Typical removal rate | SiO2: 14 mm3/h (RF37-i), 96 mm3/h (RF120-i) |
Thickness variation | < 0.5 nm RMS (dependent on input quality) |
Base pressure | < 1 x 10-6 mbar |
System dimensions | 3.60 m x 7.70 m x 3.40 m |
Configurations | Single chamber with sliding doors, manual loading with transport cart, 3- or 4-axis control system for |
Software interfaces | SECS II / GEM, OPC |