High-Quality Cleaning and Qualification up to 800 mm in dia. and 500 mm in height

The scia Clean 800 is used for dry cleaning of 3-dimensional shaped substrates with weights up to 500 kg. The chamber design and functionality ensures a very good base pressure and allows to quantify even small residual contaminations on the substrate by mass spectroscopy measurement.

Features & Benefits

  • Low base pressure and fast pumping due to electropolished and heated vacuum chamber
  • Separate substrate heating for improved desorption
  • Qualification of residual contamination by high-sensitive mass spectroscopy
  • Optional plasma source for advanced cleaning with H2 plasma
  • Recipes for repeatable temperature ramps and fully automated cleaning cycles
  • Crane for loading of large and heavy substrates

Applications

  • Ultra-high purity cleaning of X-ray optics
  • Cleaning of components for beam line accelerators
  • Outgassing qualification of complex vacuum assemblies

Principle

  • Removing of contaminations from the 3-dimensional shaped substrates by using ultra-high vacuum (vacuum desorption)
  • Further cleaning progress with optional heating of the substrate and/or chamber (thermal desorption) and applying plasma treatment
     

Technologies

Dry Cleaning allows the removal of substrate surface contaminations in vacuum with different methods. These methods can be applied successively to optimize the cleaning results.

Technical Data

Substrate size (up to)

800 mm dia., 500 mm height, 500 kg

Substrate heating

Radiation heaters (4.5 kW) up to 250 °C

Chamber heating and cooling

Pressurized water based heating up to 150 °C and cooling (8 kW)

Plasma sources

Optional ICP plasma source (PI400), max. 2.5 kW

Base pressure

< 5 x 10-9 mbar

Quality control

Mass spectrometer for quantitative outgassing measurement

System dimension (W x D x H)

1.30 m x 2.50 m x 1.40 m (without electrical rack and pumps)

Configuration

Single chamber with top lid, optional crane for loading of heavy substrates

Software interfaces

SECS II / GEM, OPC

More Dry Cleaning Systems

scia Clean 1000/1500/3000

for high-quality cleaning and qualification
up to 3 m dia. and 3.4 m length