Learning: Scientific Content about Thin Film Technology

We want to support the continuous development of plasma and ion beam technology, so we share our knowledge. The learning portal of scia Systems offers scientific insights for both beginners and experts. If you have any questions or need more information on any topic, please do not hesitate to contact us.


Ion beam figuring for telescope mirrors

Video presentation: surface error correction under high vacuum conditions.

Ion beam etching for optics structuring

Video presentation: How to structure your optics with reactive ion beam etching.


Direct etching of slanted gratings

Video presentation: Etching of SRG used as in- and out-coupler in waveguides.

Overview of PVD Technologies

Comparison of ion beam sputtering, magnetron sputtering and evaporation. 


Ion beam trimming of POI wafers

Video presentation: Surface correction of piezoelectric materials

Magnetron Sputtering of silicon dioxide

Advantages of magnetron sputtering for SiO2  deposition

Additional Information

Technology Overview

Ion beam and plasma processes for etching, coating and cleaning of substrates.

Application Notes

Selected applications for MEMS, optics and sensors, presented in detail.

Product Portfolio

Discover our equipment for coating, etching and cleaning processes.