Magnetron Sputtering

Pro: High precisionCon: Stress
Rate: MediumTemperature: Low temperature possible
Layer density: Dense

 

Magnetron Sputtering Systems

scia Magna 200

for advanced wafer coatings
of up to 200 mm

scia Multi 680

for multilayer coating for large
substrates up to 680 mm

scia Multi 1500

for multilayer coating for large
substrates up to 1500 mm

Test für Formular

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