In a strategic move to enhance its technological leadership, the Advanced Mask Technology Center (AMTC) has acquired a new cluster system from scia Systems, with strategic support from Tekscend Photomask. This advanced equipment significantly strengthens AMTC’s capabilities in providing photomasks and masters for nanoimprint lithography, enabling the fabrication of slanted trench and grating patterns with outstanding precision and quality to Tekscend customers.

Photomasks play a crucial role in the semiconductor manufacturing process—without them, chip production would not be possible. By providing next-generation photomasks, AMTC empowers its customers to advance their technological innovations and maintain competitiveness in rapidly evolving markets.

Provided by scia Systems, the newly installed scia Cluster 215 is a state-of-the-art cluster system comprising two processing chambers and a central handling robot. It is specifically designed for ion beam etching of optical materials such as quartz, offering exceptional flexibility and accuracy. This installation is the first of its kind in photomask production, highlighting AMTC’s pioneering role in advancing mask manufacturing technology.

The first chamber, the scia Mill system, is equipped with a broad ion beam source supporting both Ion Beam Etching (IBE) using inert gases and Reactive or Chemically Assisted Ion Beam Etching (RIBE/CAIBE) using reactive gases.

The second chamber, the scia Trim system, employs a focused broad ion beam with a fine focal point, enabling highly precise trimming of substrates.

By integrating scia Systems’ cutting-edge ion beam technology, AMTC expands its production capabilities and reinforces its position as Europe’s leading mask facility. The investment enables Tekscend through AMTC to supply their customers with superior photomasks and masters for nanoimprint lithography, driving progress and innovation across the global semiconductor industry. Potential applications for these high-precision components include AR/MR/VR headsets and smart glasses, smartphone and automotive sensors, and advanced medical imaging systems.

• For more information on the cluster system, please visit www.scia-systems.com/cluster.
   
• Learn more about the technology of ion beam etching / ion beam milling.
   
• Do you have any questions? Our team will be happy to help you. Contact us!

About AMTC

The Advanced Mask Technology Center GmbH & Co. KG (AMTC) is a joint venture of GLOBALFOUNDRIES and Tekscend Photomask. Founded in 2002 in Dresden, Germany, AMTC is a world-leading center for the development and production of photolithography masks, supporting the global semiconductor ecosystem with innovation, precision, and reliability.

For more information, visit www.amtc-dresden.com.

About scia Systems

scia Systems GmbH was founded 2013 in partnership with the VON ARDENNE GmbH from Dresden and is located in Chemnitz, Germany. As manufacturer of precise surface processing equipment, based on advanced ion beam and plasma technologies, scia Systems established itself in a very short time on the worldwide market. Our customers are companies and research institutes, mainly in the field of microelectronics, MEMS and precision optics manufacturing.

About Tekscend Photomask

Tekscend Photomask Corp. is the world's premier provider of photomasks for semiconductors. Headquartered in Tokyo, Tekscend leverages its worldwide customer service network and eight manufacturing facilities in key geographic locations to offer the world's most advanced photomask technology. Tekscend has also expanded into nanoimprint molds, waveguides, and other nano-fabricated products.

For more information, visit www.photomask.com.