Augmented reality (AR) and mixed reality (MR) have swiftly transitioned from a futuristic concept to a practical technology, altering the landscape of numerous sectors. For the development of lightweight near-eye displays, surface relief gratings (SRG) are employed to couple light from the source into the waveguide and then guide it out toward the eye. Ion beam trimming has been adapted as a versatile approach for creating SRGs with varying trench depths.
This study demonstrates how reactive ion beam trimming can be utilized to produce slanted surface relief gratings, featuring different grating geometries in terms of width and pitch, suitable for the specific requirements of nanoimprint lithography.