The scia Coat 200 system provides excellent uniformity for coating and etching processes using ion beam sputter deposition (IBSD) and ion beam etching (IBE).

Chemnitz, February 11, 2026 - scia Systems GmbH, the industry leader in advanced ion beam and plasma process equipment for microelectronics, MEMS, and precision optics industries, today announced that SPINTEC (SPINtronique et TEchnologie des Composants), one of the leading spintronics research laboratories worldwide, has recently invested in a scia Coat 200 from scia Systems. The installation of the new ion beam sputtering system has been completed at its MINATEC campus, an international hub for micro- and nanotechnology research in Grenoble, to produce its high-performance magnetic tunnel junctions (MTJs) for non-volatile memory (STT-MRAM), sensors, and neuromorphic computing. 

High-Quality Multilayer Deposition with scia Coat 200 

The scia Coat 200 uses ion beam sputtering (IBS) to achieve smooth, dense, and defect-free thin-film deposition. The IBS technology provides excellent uniformity for any coating, achieved through substrate rotation and tilt on substrates up to 200 mm. The system is equipped with a second ion-beam source enabling homogeneous full-surface ion-beam etching to influence the growing film or pre-clean the substrate. In-situ process control ensures excellent process stability. The scia Coat 200 system enables the handling of wafers or arbitrarily shaped substrates. 

“We are pleased that SPINTEC decided to go with scia Systems as their supplier for ion beam sputtering and to support their fabrication of magnetic tunnel junctions,” stated Dr. Michael Zeuner, Managing Director of scia Systems.

• More information on the scia Coat 200 system is available at www.scia-systems.com/scia-coat-200.
   
• Learn more about the technology of ion beam deposition.
   
• Do you have any questions? Our team will be happy to help you. Contact us!

About scia Systems GmbH

Founded in 2013, scia Systems is a technology leader in thin-film process equipment based on advanced ion beam and plasma technologies. The systems are used for coating, etching, and cleaning processes with nanometer resolution and have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries. For more information, visit the company’s website at www.scia-systems.com.

Company Contact

Mandy Gebhardt
Head of Marketing
scia Systems GmbH
Tel: +49 371 33561 322
E-Mail: m.gebhardt@scia-systems.com