Magnetic field sensors for flexible and wearable devices are the key technology for motion detection, e.g. in industrial robotics, prosthetics, and virtual and augmented reality applications.
Sensors based on the giant magnetoresistance (GMR) effect can be printed on polymer films with a material thickness of 1 μm to 150 μm using a polymer carrier.
This GMR technology places high demands on a coating system. For instance, GMR stacks, which usually consist of multiple Co and Cu layers about 1 nm thick (Fig. 1), require an accuracy of the layer thickness of better than 0.1 nm. In our new Application Note, we provide an insight into the production of this sensors.