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Ion Beam Trimming System for Silex Microsystems in China

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Silex Microsystems, the world's largest pure-play MEMS foundry, is expanding its facility in Beijing, China. Recently, a scia Trim 200 was commissioned there, a high-volume production system for precise surface correction of wafers up to 200 mm.

The tool is used to produce filters by local ion beam trimming, which are needed for high frequency technology, for example in WLAN or mobile communication.

Besides this first system, which is now handed over to production, two other tools will be installed in Silex over the next months. We are looking forward to a successful partnership!