scia Multi 300: multilayer coatings for wafers up to 300 mm dia. by magnetron sputtering

The scia Multi 300 is the new magnetron sputtering system made by scia Systems. It was especially designed for the deposition of high-quality multilayer coatings on wafers up to 300 mm.

The synchronized orbital and spin rotation ensures excellent uniformity and very good reproducibility, while the face-down orientation of the substrates guarantees minimal particle load. Up to four magnetrons allow high-precision multilayer stacks of four target materials without interrupting the vacuum.

The scia Multi 300 is already being used by the Helmholtz-Zentrum Dresden-Rossendorf (HZDR) to produce flexible magnetoelectronics. These shapeable magnetic sensors are used in consumer electronics as control sensors, in the Internet of Things (IOT) and in smart implants, among other applications.