News

scia Mill 200 for Fraunhofer ENAS

Again, Fraunhofer Gesellschaft relies on one of scia Systems’ ion beam etching tools. scia Systems was awarded for a scia Mill 200 by Fraunhofer Institute of Electronic Nano Systems ENAS. The tool will be installed in Chemnitz and will be used for patterning of magnetic multilayers for GMR-stacks (giant-magneto-resistance) or TMR-stacks (tunnel-magneto-resistance) on standardized 200 mm silicon wafers.

scia Mill 200 for Fraunhofer IMS

scia Systems awarded the contract of an ion beam etching system for the Fraunhofer Institute for Microelectronic Circuits and Systems, IMS.  

We are pleased to deliver a scia Mill 200 to Fraunhofer IMS. The ion beam etching system with end point detection will be integrated into the Institute's laboratory as part of the „Forschungsfabrik Mikroelektronik Deutschland“ funded by BMBF. It is primarily intended for process development and production of MEMS, like infrared detectors, pressure sensors and biocompatible MEMS systems. Thereby, especially materials are structured, which cannot be etched by classical RIE or which have special geometries with high aspect ratios.

Participation on cooperative project – ALMET

Together with project partners scia Systems is working within the ALMET project on the development of systems and processes for the atomic layer deposition of metallic thin films (mALD). The objective of the project is the conformal deposition of copper and cobalt thin films within an industrial-suited ALD reactor. The reactor allows plasma assisted ALD (PALD) by a special chamber-in-chamber layout and enables a variety of different ALD processes. scia Systems is pleased to support the project with its experience and know-how.

SCHAU REIN! at scia Systems

We are taking part at the week of open companies and open our doors on 15-03-2019 from 14 o'clock for interested pupils. We will present our company and our apprenticeships.

The registration form and further information can be found here.

We look forward to your visit!

scia Coat 500 and scia Trim 200 for Tongji University, China

The Institute Precision Optical Engineering of the Tongji University in Shanghai, one of Chinas renowned universities, ordered a scia Coat 500 and a scia Trim 200, which will be delivered by end of 2020.

The scia Coat 500 will be used for manufacturing of periodic multilayers in nm range on X-ray mirrors for beamline optics, by dual ion beam sputtering (DIBS). Due to the high homogeneity requirements of those optics, a surface adjustment is needed previously to the deposition process. Therefore, a surface form error correction is done with the scia Trim 200 by local ion beam figuring (IBF) beforehand.

Joint apprenticeship at scia Systems

In order to cover the entire spectrum of vocational education, scia Systems works together with the Bildungs-Werkstatt Chemnitz additional to its own vocational training. This joint apprenticeship enables us to convey all educational contents to our trainees, according the Vocational Training Act. The Bildungs-Werkstatt Chemnitz, with its modern and qualified educational offerings, is a strong partner in continuously improving our apprenticeship quality today and in the future.

We look forward to continuing our successful cooperation. You can find our vacancies for apprenticeship in 2019/20 here.

scia Mill 300 for Fraunhofer IZM

The Fraunhofer Institute for Reliability and Microintegration (IZM) has awarded scia Systems the contract for an ion beam etching system.

The equipment is funded by BMBF within „Forschungsfabrik Mikroelektronik Deutschland“ and it is primary intended for fabrication of metallic microstructures on semiconductor substrates. Depending on the metal to be etched and its position inside of a layer stack, the system uses inert gases, e.g. Argon, as well as reactive gases or mixtures thereof.

We are pleased to deliver a scia Mill 300, designed for processing of 300 mm wafers, to Fraunhofer IZM. Core component of the system is a new developed ion beam source for those substrates sizes. With the further development of the existing product portfolio, scia Systems can better serve customer wishes for larger substrates.