scia Coat 500 and scia Trim 200 for Tongji University, China

The Institute Precision Optical Engineering of the Tongji University in Shanghai, one of Chinas renowned universities, ordered a scia Coat 500 and a scia Trim 200, which will be delivered by end of 2020.

The scia Coat 500 will be used for manufacturing of periodic multilayers in nm range on X-ray mirrors for beamline optics, by dual ion beam sputtering (DIBS). Due to the high homogeneity requirements of those optics, a surface adjustment is needed previously to the deposition process. Therefore, a surface form error correction is done with the scia Trim 200 by local ion beam figuring (IBF) beforehand.

Joint apprenticeship at scia Systems

In order to cover the entire spectrum of vocational education, scia Systems works together with the Bildungs-Werkstatt Chemnitz additional to its own vocational training. This joint apprenticeship enables to us to convey all educational contents to our trainees, according the Vocational Training Act. The Bildungs-Werkstatt Chemnitz, with its modern and qualified educational offerings, is a strong partner in continuously improving our apprenticeship quality today and in the future.

We look forward to continuing our successful cooperation. You can find our vacancies for apprenticeship in 2019/20 here.

scia Mill 300 for Fraunhofer IZM

The Fraunhofer Institute for Reliability and Microintegration (IZM) has awarded scia Systems the contract for an ion beam etching system.

The equipment is funded by BMBF within „Forschungsfabrik Mikroelektronik Deutschland“ and it is primary intended for fabrication of metallic microstructures on semiconductor substrates. Depending on the metal to be etched and its position inside of a layer stack, the system uses inert gases, e.g. Argon, as well as reactive gases or mixtures thereof.

We are pleased to deliver a scia Mill 300, designed for processing of 300 mm wafers, to Fraunhofer IZM. Core component of the system is a new developed ion beam source for those substrates sizes. With the further development of the existing product portfolio, scia Systems can better serve customer wishes for larger substrates.

Participation on research project – HiPERFORM

Together with 30 project partners from 8 European countries scia Systems is working on the HiPERFORM - project to introduce wide band-gap power electronics in the drivetrain of electric vehicles. The main research objectives of the project are: cost reduction, energy efficiency and less volume of the devices. Research will focus on both new materials and improved manufacturing processes, such as the cost-effective deposition of gallium nitride (GaN) by magnetron sputtering. The topic of scia Systems is the development of a substrate holder which meets the special requirements regarding temperature and process time. read more

scia Vario 100 for the Helmholtz-Zentrum Berlin

HZB - Institute of Solar Fuels

The Institute of Solar Fuels of the Helmholtz-Zentrum Berlin für Materialien und Energie (HZB) has awarded scia Systems the contract for a cluster coating system.

With the system the HZB will deposit nanostructured thin films for the fabrication of photoelectrodes, which are used for efficient fuel production by splitting water into hydrogen and oxygen. The generation of such nanostructures requires layer coating by a particular PVD technique called glancing angle deposition (GLAD).

The scia Vario 100 implements the GLAD principle with a self-developed substrate holder in conjunction with an automatic slit aperture. Available process parameters involve tilting, rotation and temperature control of the substrate holder. In addition, the distance to the coating source as well as the slit width and speed can be adjusted to reach the desired process results. The deposition takes place in separate process chambers using electron beam evaporation and dual ion beam sputter deposition (DIBD).

scia Trim 200 for Akoustis Technologies

Akoustis Technologies, Inc.

scia Systems is supplying a scia Trim 200 to the Canandaigua, NY manufacturing facility of Akoustis Technologies, Inc. Akoustis® is a RF filter solutions company manufacturing a unique, patented XBAW™ technology to produce single-crystal bulk acoustic wave (BAW) RF filters for mobile and other wireless markets.

The scia Trim 200 will be used to trim BAW devices precisely to specified frequencies, helping Akoustis to maximize yield, lower costs, and optimize quality. scia Systems provides not only systems, but award-winning service and technical support to help manufacturers reach their production goals.

scia Trim 200 for the NASA

NASA Goddard Space Flight Center

scia Systems was awarded a contract by the NASA Goddard Space Flight Center of Greenbelt, MD, USA to supply a scia Trim 200 for Ion Beam Figuring.

The NASA GSFC has one of the nation's largest groups of scientists and engineers who build spacecraft, instruments, and develop new technology to study Earth, the sun, our solar system and the universe.

The scia Trim 200 will be used for the finishing of mono-crystalline mirror substrates for x-ray telescopes. scia Systems is very much looking forward to working with NASA to enable further astronomical understanding of the universe.

scia Coat 200 for Sofradir


scia Systems has been awarded the contract for a scia Coat 200 with ion beam etching and deposition technology by Sofradir, France. The Sofradir Group is the leading developer and manufacturer of infrared sensors for military, space, commercial and industrial applications.
scia Systems is looking forward to deliver the scia Coat 200, which will be used for production and development of infrared sensors based on III-V semiconductor compound technology, to Sofradir.

Exhibitions 2019

MEMS 2019
01/28/2019 to 01/31/2019
Seoul, South Korea
Booth: #12 (Woowon Technology)
NCCAVS Equipment Exhibit
02/21/2019 to 02/21/2019
San Jose, CA, USA
Exhibitor: AARD Technology
The Japan Society of Applied Physics, Spring Meeting
03/09/2019 to 03/12/2019
Tokyo, Japan
Exhibitor: Hightec Systems
14. ThGOT Thementage Grenz- und Oberflächentechnik
03/12/2019 to 03/14/2019
Zeulenroda, Germany
Global Semiconductor Forum
03/13/2019 to 03/15/2019
Shanghai, China
Laser World of Photonics China
03/20/2019 to 03/22/2019
Shanghai, China
Exhibitor: OpTurn
Semicon China
03/20/2019 to 03/22/2019
Shanghai, China
Booth: 5127 (WESi Technology)
SPIE Optics+ Optoelectronics
04/02/2019 to 04/03/2019
Prague, Czech Republic
Booth: 303
04/15/2019 to 04/18/2019
Orlando, FL, USA
04/24/2019 to 04/26/2019
Yokohama, Japan
Exhibitor: Hightec Systems
Transducers Eurosensors
06/24/2019 to 06/26/2019
Berlin, Germany
Booth: 17
Laser World of Photonics
06/24/2019 to 06/27/2019
Munich, Germany
Booth: B1.233
Semicon West
07/09/2019 to 07/11/2019
San Francisco, CA, USA
Booth: 1065
10/07/2019 to 10/09/2019
Glasgow, UK
10/08/2019 to 10/10/2019
Dresden, Germany
SPIE Optifab
10/15/2019 to 10/17/2019
Rochester, NY, USA
Booth: 811