Ion Beam Figuring of X-Ray Mirrors

X-ray astronomy has made significant contributions towards understanding the evolution of the universe. Many astronomical objects emit radiation in the x-ray band that can be analyzed to gain knowledge about the evolution of black holes, supernovae and structure of galaxies.

X-ray telescopes must be operated in space, due to absorption of x-ray by the earth’s atmosphere. Because of the short wavelength of x-rays, focusing mirrors must aligned for grazing incidence of light. As the objects being studied have a low delivery of radiation (a few photons per hour), every single photon is of particular interest. To increase collection efficiency, hundreds or thousands of mirrors are nested concentrically, as in a Wolter telescope (see Fig. 1). To ensure good image quality, the surface geometry of the reflective x-ray mirrors must be as close to ideal as possible. Any deviation between the ideal mirror geometry and the real mirror geometry is critical for imaging quality.

The basic shape of the mirrors is made from silicon blocks which at first are brought into shape by mechanical machining, and then applying chemical mechanical polishing (CMP) to the reflecting side. However, due to the rectangular shape of the mirrors and their curvature, the residual error of CMP processing is still several hundred nanometers in range. This residual error can be corrected by means of ion beam figuring (IBF).

In this example, scia Systems GmbH has applied IBF to mirrors provided by the NASA Goddard Space Center (see Fig. 2). The IBF is performed by scanning a focused ion beam (FWHM < 10 mm) in a meander-like path across the mirror surface, varying the dwell time over each location to remove precisely the amount of material needed to correct form errors. The removal rate of the beam is determined not only by the material and ion beam energy, but also on the angle of incidence of the ion beam. (see Fig. 3). Due to this angular dependency of removal, the contour of the mirror must be taken into account. Based on the measured form error distribution and the mirror contour, the dwell time map can be calculated.

Sample mirrors from NASA were treated by IBF using a scia Trim 200 Ion Beam Figuring system. In Figure 4 the pre-IBF error distribution is shown on the top, and the post-IBF on the bottom. The RMS residual error after a single IBF step can be reduced by a factor of more than 14 and values in the single-digit nanometer range can be achieved.
By applying a second IBF step with smaller ion beam size the remaining residual error can be reduced even further.

Related product: scia Trim 200 for Ion Beam Trimming/Figuring

    • Reduction of deviation between ideal and real mirror surface
    • Production system for high throughput
    • Automatic handling system available

    Fig. 1: Wolter Telescope

    Wolter Telescope courtesy of NASA Goddard Space Flight Center

    Fig. 2: X-ray Mirror

    X-ray Mirror courtesy of NASA Goddard Space Flight Center

    Fig. 3: Angle dependence of etch rate

    The angle dependence of the Si etch rate can be determined in a preliminary test and accounted for in the target amount of material to be removed.

    Fig. 4: RMS error topology

    RMS error topology of a Si x-ray mirror before and after IBF processing (Before 98.9 nm,  After 6.9 nm, Improvement factor 14.3).