Fields of Application

The processing equipment of scia Systems is mainly used in the production of microelectronics, MEMS and precision optical components, but there are also applications in the biomedical sector. The product range includes systems for high volume productions as well as equipment for research and development environment.

Etching of MEMS

Frequency Trimming

of Bulk Acoustic Wave (BAW) filters

Surface Trimming

of Surface Acoustic Wave (SAW) filters

Thickness and Pole Width Correction

of write poles of thin film recording heads

Deposition on Optics

Coating of Dielectric Films

on large optical substrates