Fields of Application

The processing equipment of scia Systems is mainly used in the production of microelectronics, MEMS and precision optical components, but there are also applications in the biomedical sector. The product range includes systems for high volume productions as well as equipment for research and development environment.

Etching of MEMS

Frequency Trimming

of Bulk Acoustic Wave (BAW) filters

Surface Trimming

of Surface Acoustic Wave (SAW) filters

Film Thickness Correction

of thin film read/write heads

Etching of Sensors

Etching of Magnetic Multilayers

for TMR sensors

Etching of Lithium Tantalate

for IR sensors

Processing of Optics

Dielectric Coatings (IBS)

on large substrates

High- and Anti-reflective Coatings (IBS)

for optical substrates

Form Error Corretion (IBF)

for X-ray mirrors