Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.


Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers all over the world.


Do you want to play an active role in a high-tech and fast-growing market environment and build up a successful career? Discover our oppotunities:




Our equipment is mainly used in the production of MEMS and precision optical components, but it is also used in astronomy, automotive and biomedical technology.


scia Systems stands for highly reliable equipment to meet expectations for today and the future. Our experienced and qualified team assists you to find the optimal system and process design for your production requirement.

Runxin MEMS Technologies increases output yield of produced filters by ion beam trimming

In March 2022, Runxin MEMS Technologies Co., Ltd. was established in the Microelectronics Science Park as a new industrial base for MEMS production in the Nanchang High tech Zone. The company now expands its capacities by purchasing a scia Trim 200. With this ion beam trimming system especially the production of BAW and SAW filters will be more efficient. By layer thickness trimming, the yield of functional components can be increased up to 90%...

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Runxin MEMS Logo


2023-01-31 to 2023-02-01
San Francisco, USA
Booth: 108 (Floorplan)
Partner on site: AARD Technology

Semicon Korea

2023-02-01 to 2023-02-03
Seoul, South Korea
Booth: A210 (Floorplan)
Partner on site: Woowon Technology

SPIE Advanced Lithography

2023-02-28 to 2023-03-01
San Jose, USA
Booth: 533 (Floorplan)
Partner on site: AARD Technology


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