scia Systems - From Nano to Infinity

Expertise in Thin Film Technology

scia Systems, based in Chemnitz, Germany, develops and manufactures high-end equipment for ultra-precise surface processing using advanced ion beam and plasma technologies. The systems are designed for coating, etching, and cleaning with nanometer accuracy. scia Systems stands for perfection at the nanometer scale. Since its foundation in 2013, scia Systems has established itself as a technology leader in thin-film processing. The equipment is known for its reliability, flexibility, and performance, tailored to the specific needs of high-volume production and research applications.

scia Systems offers a wide range of ion beam and plasma process equipment that enables our customers to design new and innovative products with unique functional properties. Machines made by scia Systems have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries.

Products

Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.

Applications

Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.

Company

Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about.

Latest News

The Fraunhofer Institute for Electronic Nano Systems ENAS purchases a scia Cluster 200 for the development of micro- and nanoelectronics. The system is suitable for processing wafers up to 200 mm in diameter. It is equipped with a load lock and transfer chamber with a handling robot, two magnetron sputter chambers, and an ion beam etching system.