Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.


Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers all over the world.


Do you want to play an active role in a high-tech and fast-growing market environment and build up a successful career? Discover our oppotunities:




Our equipment is mainly used in the production of MEMS and precision optical components, but it is also used in astronomy, automotive and biomedical technology.


scia Systems stands for highly reliable equipment to meet expectations for today and the future. Our experienced and qualified team assists you to find the optimal system and process design for your production requirement.

scia Mill 200 starts its Journey to Chinese Cutting-Edge Technology

scia Systems is happy to announce the purchase of our ion beam etching system scia Mill 200 by another top C9 university of China: the Shanghai Jiao Tong University. It was founded in Shanghai in 1896 and has a long history in engineering and managerial sciences. With around 40,000 students the university offers opportunities in nine major disciplines: economics, law, literature, science, engineering, agriculture, medicine, management and arts.

scia System will support the university in its goal of becoming a "comprehensive, innovative and international" world-class university by supplying an ion beam etching tool with highest flexibility.

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Logo SJTU with scia Mill 200

MWE 2022

2022-11-30 to 2022-12-02
in Yokohama, Japan
Partner on site: Hightec Systems


2022-12-07 to 2022-12-09
Shenzhen, China
Partner on site: OpTurn

SPIE Photonex

2022-12-07 to 2022-12-08
Birmingham, United Kingdom
Booth: 421 (Floorplan)
Partner on site: IES Equipment Partners


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