Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.


Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers all over the world.


Do you want to play an active role in a high-tech and fast-growing market environment and build up a successful career? Discover our oppotunities:




Our equipment is mainly used in the production of MEMS and precision optical components, but it is also used in astronomy, automotive and biomedical technology.


scia Systems stands for highly reliable equipment to meet expectations for today and the future. Our experienced and qualified team assists you to find the optimal system and process design for your production requirement.

Our commitment 2023: scia Systems supports local nonprofits with a total of 5000 Euro

Supporting social and charitable projects is an important aspect of our corporate philosophy. As a globally active company, we know how important it is to maintain local ties and support the region where we work. That way we can help make Chemnitz and the surrounding area an attractive home for families, students and professionals. We are therefore proud to support small and large associations with a total of 5,000 euros.

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Our Engagement 2022


2023-03-20 to 2023-03-23
San Diego, USA
Booth: 102
Partner on site: AARD Technology


2023-03-27 to 2023-03-29
Bochum, Germany


Clean Event 2023

Veldhoven, Netherlands
Booth: 38 (Floorplan)
Partner on site: Benelux Process


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