Expertise in Thin Film Technology

scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. The process equipment is flexible and modular in design, thus can be easily configured for research applications and for high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.


Our systems are flexible and modular in design. This enables us to offer standard as well as individual solutions for our customers.


Our equipment is mainly used in the production of MEMS and precision optical components, but also in astronomy and biomedical technology.


Pushing the latest technologies with ambition and constantly evolving - that's what scia Systems is all about. 

scia Systems to present high-precision ion beam and plasma technologies for processing high-tech optics at Optatec 2024

scia Systems GmbH will exhibit at Optatec 2024. From May 14 to 16, 2024, the company will present its latest process solutions for coating and structuring based on advanced ion beam and plasma technologies at the exhibition in Frankfurt am Main. The applications include the production of high-reflective and anti-reflective coatings, form error correction for X-ray and telescope mirrors, and structuring optical gratings for augmented reality (AR) glasses.

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2024-05-13 to 2024-05-15
Chengdu, China
Booth: A03
Partner on Site: WESi Technology


2024-05-14 to 2024-05-16
Frankfurt a. M., Germany
Booth: 715 in hall 3.1 (Floorplan)


2024-05-29 to 2024-05-30
Grenoble, France
Booth: 6 (Floorplan)


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